Arch Chemical Microelectronic Materials - Quonset, RI

• Design/Build, fast-track, Greenfield project

• Cleanrooms for photolithography 490 SF Class 1,000,
__240 SF Class 10,000, and 3,500 SF Class 100,000

• Vibration isolation for critical photolithography processing

• Critical RH and temperature control for photo resist coating

• Photo resist production facility including supply and install
__of all process equipment

• Tool hook-up in cleanrooms and production area

• Precast and metal panel exterior

• Provided cleanroom design and construction