Axcelis Corporation Wafer 2000 - Beverly, MA

• 70,000 SF corporate headquarters and semiconductor facility

• Creation of Class 1,000 cleanroom space

• Interior and exterior renovations

• Interactive customer training facility

• Corporate street connecting facility with manufacturing site

• 3" limestone accent wall

• New central plant to support expansion and existing plant

• Flush light, gel seal, ULPA filter ceiling Class 10

• Depressed slab with perforated raised access
__floor at Class 10

• Direct drive Class 1, plug fans for recirculation air

• Installation of process equipment

• Completed: August 2001