Client: Axcelis Corporation
Project: Wafer 2000
Project Type: New Construction
Industry: Microelectronic Cleanrooms
Project Highlights
- 70,000 SF corporate headquarters and semiconductor facility
- Creation of Class 10 cleanroom
- Interior and exterior renovations
- Interactive customer training facility
- Corporate street connecting facility with manufacturing site
- New central plant to support expansion and existing plant
- Flush light, gel seal, ULPA filter ceiling Class 10
- Depressed slab with perforated raised access floor at Class 10
- Direct drive Class 1, plug fans for recirculation air
- Installation of process equipment
- Installed aluminum wall panel system, high end metal fabrication and curtain wall systems in the cleanroom
- Exterior walls were Alucabond aluminum wall panels, Kawneer glazer curtain wall, and 3” Minnesota travertine limestone
- Value: $18,500,000
- Completed: August 2001
- Designer: IDC
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