Client: Digital Equipment Corporation
Project: Fab 4 Annex, Phase 1-3
Project Type: Design/Build
Industry: Microelectronic Cleanrooms
Project Highlights
- Size: 3,000 sf
- (3) 1,000 sf Class 1 @ .12 micron cleanroom bays
- Included nickel chrome raised access floor, ½” modular and 2” honeycomb aluminum wall panels, gel seal 2” t-bar grid with 100% ULPA coverage
- Also included custom built modular vaneaxial recirculation fans
- Installed a custom 30,000 cfm make-up air unit and a new 20,000 cfm scrubbed exhaust system
- Acid exhaust system was installed using fire rated FRP ductwork
- Hodess also hooked up all tools
- Designer: Advance D-Zign
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