Client: Fuji Film
Project: Microelectronic Materials
Project Type: Design/Build
Industry: Microelectronic Cleanrooms
Project Highlights
- Size: 50,000 sf
- Cleanrooms for photolithography 490 SF Class 1,000, 240 SF Class 10,000, and 3,500 SF Class 100,000
- Design/Build, fast-track, Greenfield project
- Vibration isolation for critical photolithography processing
- Critical RH and temperature control for photo resist coating
- Photo resist production facility including supply and install of all process equipment
- Tool hook-up in cleanrooms and production area
- Precast and metal panel exterior
- Provided cleanroom design and construction
- Industrial cleanroom
- Construction Manager
- Value: $22,500,000
- Architect: SMRT
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